Hunan Jingtan Automation Equipment Co., LTD.
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| Parameter /Model No. | JT-0305-C | JT-0505-C | JT-0608-C | JT-0608-C | JT-0812-C | JT-1120-C | JT-1218-C | JT-1520-C |
| Working Zone Size φ×H(mm) | 300×500 | 500×500 | 600×800 | 600×1200 | 800×1200 | 1100×2000 | 1200×1800 | 1500×2000 |
| Highest Temperature (℃) | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 | 2300 |
| Temperature uniformity(℃) | ±5 | ±5 | ±5/±7.5 | ±7.5/±10 | ±7.5/±10 | ±10/±15 | ±10/±15 | ±15/±20 |
| Limit Vacuum Degree(Pa) | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 | 1-100 |
| Limit Vacuum Degree(Pa) | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 |
| Heating method | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction | Resistance/induction |
| Design temperature | 1250℃/1650℃/1800℃/2200℃ |
| Common temperature | 900~1200℃ |
| Vacuum degree | < 50Pa |
| Pressure rise rate | 6.67pA /h(or 150Pa/24h) in cold state of empty furnace |
| Heating mode | graphite resistance heating or induction heating, independent temperature control, good temperature uniformity |
| Atmosphere medium | vacuum /CH4/C3H6/H2/N2/Ar |
| Gas control mode | mass flow meter control, multi-channel gas path, uniform flow field, no deposition dead Angle, good deposition effect;Multi-stage and efficient exhaust treatment system, environmentally friendly, easy to clean up |
| Furnace type | square, round, vertical or horizontal structure (non-standard design), fully enclosed deposition chamber, good sealing effect, strong anti-pollution ability; |
| Furnace cooling mode | furnace shell water cooling, external circulation quick cooling system can be selected, short cooling time, high production efficiency; |
| Structure form | horizontal - side discharge, vertical - up/down discharge |
| Locking mode | manual/automatic |
| Shell material | inner stainless steel/all stainless steel |
| Insulation material | carbon felt/graphite felt/carbon fiber cured felt |
| Infrared instrument | single colorimetric/double colorimetric |
| Power supply | KGPS/IGBT(only suitable for medium frequency heating) Product parameter: |