Hunan Jingtan Automation Equipment Co., LTD.
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Product Usage:
The vapor deposition furnace is used for the CVD/CVI treatment of the surface or matrix of the material with hydrocarbon gas (such as C3H8, CH4, etc.) as the carbon source, and can be used for the surface coating of the material, matrix modification, composite material preparation, etc.
Product Features:
The electric heating method has the characteristics of uniform heating, simple operation, easy control and maintenance.
The furnace is made of special materials with strong high temperature resistance, which can withstand the weight of high temperature heating elements and heavy components, and has excellent sealing performance, which can effectively prevent the sediment growing on the substrate from being contaminated.
Intelligent pressure control, small pressure fluctuation;
The fully enclosed structure has good thermal stability, good sealing effect and strong anti-pollution ability;
Multi-channel process gas path, uniform flow, no deposition dead Angle, good deposition effect;
Multi-stage high-efficiency exhaust treatment system, environmentally friendly, efficient collection of tar and by-products, easy to clean;
The cooling method is adopted, the shell is cooled by water, the external circulation fast cooling system can be selected, the cooling time is short, and the production efficiency is high.
Product Specification
Parameter/Model | JT-CJL-04 | JT-CJL-14 | JT-CJL-31 | JT-CJL-74 | JT-CJL-127 | JT-CJL-211 | JT-CJL-326 | JT-CJL-588 |
Working Zone Size φ×H(mm) | 100×500 | 150×800 | 200×1000 | 250×1500 | 300×1800 | 350×2200 | 400×2600 | 500×3000 |
Highest Temperature (℃) | 2200/2800 | 2200/2800 | 2200/2800 | 2200/2800 | 2200/2800 | 2200/2800 | 2200/2800 | 2200/2800 |
Temperature Uniformity (℃) | ±3/±5 | ±3/±5 | ±5/±7.5 | ±7.5/±10 | ±7.5/±10 | ±10/±15 | ±10/±15 | ±15/±20 |
Vacuum Degree (Pa) | ≤30 | ≤30 | ≤50 | ≤50 | ≤100 | ≤100 | ≤100 | ≤100 |
Pressure Rise Rate (Pa/h) | 1 | 1 | 2 | 2 | 2 | 5 | 5 | 5 |
Heating Mode | Graphite resistance/induction heating | |||||||
| The above parameters can be adjusted according to the process requirements, and shall not be used as the basis for acceptance. The specific technical plan and agreement shall prevail. | ||||||||
