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Model | SGL-0690 | SGL-1015 | SGL-1220 | SGL-1530 | SGL-0610 | SGL-1120 | | | |||||||
Working volume(mm) | 600*600*900 | 1000*1000*1500 | 1200*1200*2000 | 1500*1500*3000 | 600*1000 | 1100*2000 | 1300*2000 | 1500*2000 | |||||||
Ultimate temperature(℃) | 1800 | 1800 | 1800 | 1800 | 1800 | 1800 | 1800 | 1800 | |||||||
Temperature uniformity(℃) | ±5 | ±7.5 | ±10 | ±15 | ±7.5/±10 | ±10/±15 | ±10/±15 | ±15/±20 | |||||||
Ultimate vacuum(Pa) | 50 | 50 | 50 | 50 | 50 | 50 | 50 | 50 | |||||||
PRESSURE RISE RATE(Pa/h) | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | 0.67 | |||||||
Heating method | resistance | resistance | resistance | resistance | resistance/induction | resistance/induction | resistance/induction | resistance/induction | |||||||
Processing atmosphere | vaccum/nitrogen/hydrogen | | | | | | | |